Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Recent Development in Preparation and Applications of Super Hard Films
Konosuke INAGAWA
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Keywords: physical vapor deposition, chemical vapor deposition, super hard film, ceramic film, carbide film, nitride film, oxide film, boride film, diamond film, cubic boron nitride film
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1993 Volume 59 Issue 3 Pages 373-376

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