Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Practical Application of Hard Films to Semiconductor Manufacturing Apparatus
Hiroyuki KITSUNAI, Hiroshi INOUE
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Keywords: tribologv, wear, particle, semiconductor, clean, contamination, diamond thin film, hard coatings
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1993 Volume 59 Issue 3 Pages 385-388

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