Abstract
A study is presented of measurement for flatness by fitting partial shape deviations to large discrete flatness deviations calcurated by two-dimentional least square serial point method. In this paper, two methods are proposed. One is the method that uses the optical interferometer as the measuring head, and is applied with 2 DLS 3 PM. The other is the method which uses four displacement sensors as the measuring head, and is applied with 2 DLS 2 PM. The following fact is revealed by the experiment. The results of measurement by these two methods corresponded with accuracy of 0.05 μm (2σ). The accuracy is achieved to 1/20 movement errors of X-Y table used in this experiment.
