Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Present and Future Technique of Ultraorecision Positioning
Jiro OTSUKA
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Keywords: ultraprecision positioning, positioning accuracy, present and future positioning technique, speedy positioning, high stiffness
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1995 Volume 61 Issue 12 Pages 1645-1649

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