Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Present Condition and Expectation for Ultra-precise Positioning Techniques from a Questionnaire
Shigeo SHIMIZU, Keiichiro SAKATO
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Keywords: ultra-precise positioning technique, questionnaire paper, positioning specification, resolution power, disturbance
JOURNAL FREE ACCESS

1995 Volume 61 Issue 12 Pages 1650-1655

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