Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Current and Future of Precision Positioning Stage Working in Stepper
Shinji WAKUI
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Keywords: stepper, scanner, stage, guideway, laser interferometer anti-vibration unit, control law
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2001 Volume 67 Issue 2 Pages 202-206

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