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Jiro OTSUKA, Sadaji HAYAMA, Yasuji OHASHI
2001 Volume 67 Issue 2 Pages
173-178
Published: February 05, 2001
Released on J-STAGE: March 05, 2010
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Ball Screw vs. Linear Motor
Osamu HORIUCHI
2001 Volume 67 Issue 2 Pages
179-183
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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Shigeru FUTAMI
2001 Volume 67 Issue 2 Pages
184-187
Published: February 05, 2001
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Yoshiyuki Tomita
2001 Volume 67 Issue 2 Pages
188-192
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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Katsuhiko Marume
2001 Volume 67 Issue 2 Pages
193-197
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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Shigeka YOSHIMOTO
2001 Volume 67 Issue 2 Pages
198-201
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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Shinji WAKUI
2001 Volume 67 Issue 2 Pages
202-206
Published: February 05, 2001
Released on J-STAGE: March 05, 2010
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Shigeo KIKUCHI, Takashi YAMAGIWA
2001 Volume 67 Issue 2 Pages
207-210
Published: February 05, 2001
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Hajime TAKAHASHI
2001 Volume 67 Issue 2 Pages
211-215
Published: February 05, 2001
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Kazuo MIYAGUCHI, Mizuho NINOMIYA, Shinya MAKAMURA, Daisuke MARUYAMA, Y ...
2001 Volume 67 Issue 2 Pages
217-221
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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This paper relates to achieving even distribution of internal load on ball screws in heavy duty drive system, aimed at extending the ball screw life in such applications. Based on the observation that the uneven distribution of load on the load carrying balls of a ball screw reduces the durability of the ball screw, the authors have analyzed primary factors causing uneven load distribution in ball screws of tube recirculation type. Findings by case studies indicate that variation components of load distribution in a narrow range have relation with arrangement of ball recirculation tubes and that those in a broad range are connected with the application points of the load upon the nut as well as with nut diameter. The authors developed an improved ball screw structure that minimizes the variation components of load distribution. The ball screw having the improved structure exhibits 2.4 times longer life and, practically, 3.5 times higher durability under heavy load conditions.
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Implementation of the Environmentally Conscious Product Design Support System
Kei KURAKAWA, Takashi KIRIYAMA, Yasunori BABA, Yasushi UMEDA, Hideki K ...
2001 Volume 67 Issue 2 Pages
222-228
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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Environmentally conscious design support systems need to help multiple designers to clarify variety and complicated requirements over the product life cycle in early design stages. To build such an environmentally conscious design support framework, requirement-centered design information structure and requirement clarification process which is called the ReqC (RequirementCentered) model was proposed in the preliminary report. In this paper, the GLC (Green Life-Cycle) model based on the ReqC model has been developed for supporting multiple designers to understand their design discussion in which product requirements are considered over the product life cycle. The Green Browser system is implemented in Java and CORBA based on these models. The system has been applied to an actual design session during environmentally conscious design. An Interview to designers proved the system to be useful for them.
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Masatake HIGASHI, Hiroki SENGA, Hisashi NAKANO, Mamoru HOSAKA
2001 Volume 67 Issue 2 Pages
229-234
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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This paper proposes a feature modeling method which realizes a product model in the computer according to the designer's intent and modifies its shape directly according to the change of dimensional parameters. The designer's intent is represented as topological and geometrical constraints, which the designer specifies explicitly or implicitly with the shape properties, position and size of a feature. Direct modification of features is realized with a swept volume generated locally instead of the reevaluation of a history of feature operations which is used in the current parametric modeling systems. This enables efficient and unambiguous parametric modeling by detecting inconsistency between topology and geometry. The product model composed of a feature model and a geometric model is expressed with face-based representation and processed symbolically in an algebraic computation system. The algorithms of the feature generation and modification are described and their examples are shown.
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Tsutomu MIYATAKE
2001 Volume 67 Issue 2 Pages
235-240
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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Fresnel zone plate patterns have been widely applied to mask to wafer alignment because the fresnel beam spots are unaffected by poor edge definition or by rough surfaces arising from variation in processing. This paper describes a video-based alignment using a sector fresnel zone plate (SFZP) which is unique among the zone plates in having an oblique line focus. SFZPs printed on both X-ray mask and wafers are illuminated with collimated He-Ne laser beam. The bright image formed on an oblique line focus shows high contrast better than 11-15dB in signal to background ratio. With SFZPs, position sensing repeatability better than 9 nm (3σ) has been obtained in four processed wafer types.
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Takahiro YAKOH, Masanao ITOH, Kouhei OHNISHI
2001 Volume 67 Issue 2 Pages
241-245
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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In general approach, the inverse kinematics of a manipulator has been determined by solving the kinematic equation using Jacobian matrix. However in case a link number is large, the calculation of the inverse kinematic solution becomes so complicated. Furthermore the method based on Jacobian matrix is lacking in the flexibility against the transformation of manipulator's structure. To improve this issue, this paper proposes a novel approach which does not use Jacobian matrix. In this method, the generating force is resolved from the tip to the base joint of a serial link manipulator step by step. Then the virtual force transmission is considered instead of Jacobian matrix. Since the method is independent of the kinematics of the manipulator, the method depends on only the neighboring joints and the controller. This is one of the remarkable points of the proposed approach to realize the simple and decentralized controller in the multiple DOF motion system such as plural and cooperative manipulators. This paper adopts the proposed method to the redundant manipulator and the cooperative manipulator. Furthermore, this paper succeeded to control the grasped object with its own frame directly. The efficiency of this approach is confirmed through some numerical simulations and experiments.
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Shoji TAKEUCHI, Isao SHIMOYAMA
2001 Volume 67 Issue 2 Pages
246-250
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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A TiNi thin film microactuator is designed and fabricated. In order to set the martensitic transformation temperature of the thin film to above room temperature, the compositions and annealing conditions are investigated. Ti-48at.%Ni thin films are prepared by sputtering. About 150 minutes pre-sputtering with a Ti-mesh on the target is needed to stabilize the film compo-sitions. For the experiment, the films were annealed at temperatures of 475°C, 500°C and 600°C for 20 and 60 minutes. Each of them shows the martensitic transformation temperature above room temperature. Also, the results indicated that the transformation temperatures of the films increase with increasing annealing temperature and time. Using the films, a micro clip mechanism is fabricated. The SMA actuator was used as a one-way actuator because of its simple structure that consists of the combination of beams.The microclip can clip a 0 250μm wire when 20 mA is applied to the structure. The clinging force of the micro clip measured about 800μN.
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Masaki YAMAMOTO, Keisaku YAMAGUCHI, Shinichiro AOKI
2001 Volume 67 Issue 2 Pages
251-255
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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Vibroscannning method (VS) can be a valuable tool for on-the-machine measurement of micro holes. There still exist some problems: measurement speed, measurement accuracy, measurement of arbitrary shape and ease of operation. The first two problems have been solved through a development of a new VS measurement head, which employs a fast positioning stage with a sensor feedback. The measurement head always keeps the VS probe contacted to the measured surface within a range of 80μm. The remaining problems have been solved by a new measurement system equipped with an ultra precise rotary table and a teaching microscope. The rotary table makes the probe contact to arbitrarily shaped measurement surface at right angle. With the teaching microscope, users can instruct the system on the measurement region in advance and an automatic measurement system is realized without any fear of damaging the probe. The system's usefulness has been tested through measurements of micro holes with horizontal and vertical non-destructive cross sectioning.
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Conclusions from Two Bilateral Comparisons
Sonko OSAWA, Toshiyuki TAKATSUJI, Tomizo KUROSAWA
2001 Volume 67 Issue 2 Pages
256-261
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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All sort of measurements ought to be traceable to the standard The equivalence of the standards used in different places is ascertained by round-robin comparisons. In the comparisons of the geometrical quantities, physical gauges (artifacts) are circulated and measured by all participants, and the measurement results are compared. The important matter is the shape and the dimension of the artifact do not change throughout the circulation. In this paper, the calibration procedure of the ball-plate and the estimation of the measurement uncertainty are studied. Finally, problems on the round-robin comparisons mainly about the stability of the artifact are discussed according to our experiences of international comparisons of a ball-plate.
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[in Japanese]
2001 Volume 67 Issue 2 Pages
262-264
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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Toshiji KUROBE, Natsuki SUGIYAMA
2001 Volume 67 Issue 2 Pages
265-269
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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Optical connector ferrule capillary made of zirconium oxide ceramic has been manufactured by sintering method in high temperature atmosphere, in which dimension of ferrule is unstable. In order to obtain a precise dimension of it, high speed flow finishing method developed in our laboratory has been applied to finish a inner wall of capillary. Experiments are conducted under the conditions of high flow rate of slurry suspending the aluminum oxide grains into ion-exchanged water. It is found that the surface roughness of inner wall has decreased drastically in early stage of flow pass number. SEM micrographs indicate that micosurface irregularity of as-received capillary has disappeared in a few slurry flow passes. Measuring the differential pressure between the pressure of Ar gas flowing through the capillary and the atomospheric pressure is proved to have an ability to estimate the finishing condition of inner wall surface.
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Influence of Total Base Number
Hironori MATSUOKA, Hajime ONO, Yoshihiro TSUDA
2001 Volume 67 Issue 2 Pages
270-273
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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In this paper, the effect of total base number (TBN) of calcium (Ca) sulfonates was investigated in terms of tool life (flank wear) and finished surface roughness in hobbing. Experiments were carried out using a fly tool. As a consequence, the following points were clarified: (1) Among the three kinds of Ca sulfonates having different TBN tested, Ca sulfonate at a medium 305TBN is effective concerning the long tool life irrespective of the change in the coating material and in the cutting speed. (2) The Ca sulfonate having 305TBN is suitable for the surface finish, which is the same tendency as that of the tool life.
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Fumihiro ASAO, Takushi MIYAKE
2001 Volume 67 Issue 2 Pages
274-278
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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This paper proposes a 3-D laser processing system with, in-process monitoring and feedback control of the processing depth, which enables us to process an intended shape with accuracy. While in the conventional methods the processing depth is estimated by the predetermined relation to the processing conditions and determined on post-processed measurement, in the proposed system the processing depth is obtained in real time from the propagation time of AE (acoustic emission) signal caused by laser processing. The system consisted of a Q-switched Nd:YAG laser and an AE sensor attached on the back of the specimen is applied to process a shape with its depth changed stepwise by 150μm to lmm for silicon nitride ceramic. The formerly developed laser processing method using rotating beam, named "laser-endmill", and AE signal detection synchronized with the beam rotation are employed. As a result, local overprocessing is prevented and accuracy of form less than an error of 50μm compared to the designed one is achieved.
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Accurate Positioning by Means of Two Directional Microgrooves
Osamu MIYAGAWA, Nuttaphong SORNSUWIT, Yoshimi TAKEUCHI, Tomohiko KAWAI ...
2001 Volume 67 Issue 2 Pages
279-283
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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The study proposes a new method to accurately bond two small parts without any adhesives by makinguse of ultraprecision V-shaped microgrooves created on the surfaces of each part. These V-shaped microgrooves, whose depth and dihedral angle are 20μm and 13 degree respectively, allow small parts to be tightly bonded together with high positioning accuracy dueto a wedge effect and an adhesion phenomenon between two mating surfaces. In the study, ultraprecision V-shaped microgrooves having two different directions are created by using an ultraprecision machining center with 1 nm positioning resolution and a single crystal diamond milling cutter. From experimental results, small parts of 4 mm x 4 mm x 4 mm that have V-shaped micro-grooves in two directions could be tightly bonded with 0.380 mm positioning accuracy. In addition, the new method has a possibility to bond different materials with each other. Two small parts with V-shaped microgrooves that are made of oxygen-free copper and aluminum are subjected to bonding test. The test shows the accurate and strong bonded result. As a result, the proposed bonding method is found to be effective to connect small parts accurately.
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Tetsuro SAKAMOTO, Yoshimi TAKEUCHI, Ichiro TAKAHASI, Kiwamu KASE, Masa ...
2001 Volume 67 Issue 2 Pages
284-288
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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The authors have developed a CAM system for high speed milling. The features of this CAM system are described in the following. An optimum zigzag path for high sped milling was adopted. Paths which prevent large tool load in the groove cutting for long cutting length are generated. At the tool approach area, the slant-cutting method was adopted, and at the same time, the feed speed was decreased. This contributed to the reduction of tool load and prevented chipping of cutting edge. A comparison of cutting results by the CAM developed and a commercially available CAM showed that the CAM developed realizes shorter cutting time, the same tool life and accuracy as the commercially available CAM. These results confirm that the CAM developed is useful for high speed milling.
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Toshikatsu NAKAJIMA, Shinya TSUKAMOTO, Isamu OGOU, Xinjian CUI
2001 Volume 67 Issue 2 Pages
289-294
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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In this paper, the retraction grinding method, in which the grinding wheel head gets rapidly back by very small amount immediately after beginning of spark-out state, is proposed for improving the taper error in the deep hole oscillation internal grinding. Main conclusions obtained are as follows : (1) It is made clear that by the retraction grinding method the taper error of workpiece can remarkably be improved with the fine surface roughness condition. (2) In the retraction grinding the taper generation mechanism is affected just by extending of spark-out grinding time due to a decrease of the residual stock due to the stiffness of the grinding wheel shaft and workpiece spindle. (3) By taking account of the periodic change of the normal grinding force linking to the oscillation movement, the measured taper can sufficiently be predicted.
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Development of the Cutting Machine with Inner Blade Electrode and Its Cutting Characteristics
Yuzo MORI, Kazuto YAMAUCHI, Kazuya YAMAMURA, Yasuhisa SANO
2001 Volume 67 Issue 2 Pages
295-299
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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For cutting the functional material, a mechanical machining method which applied cutting and grinding is generally used. Therefore, a deformed layer is left in the cut surface, and an another process for removing the deformed layer is required in order to restore the original performance of the functional materials. Plasma CVM (Chemical Vaporization Machining) which cannot leave deformed layer theoretically was applied to the cutting, and the equipment with high speed rotary inner blade electrode was developed, and machining characteristics using this equipment are described. Improving the cutting speed is carried out by sufficient supply of the reactant gas to the machining gap between the electrode and the work and by sufficient decomposition of supplied reactant gas. And, decreasing the kerf loss is carried out by the localization of the plasma generation.
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Takashi UEDA, Keiji YAMADA, Shiro OIKAWA, Akira HOSOKAWA
2001 Volume 67 Issue 2 Pages
300-305
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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Laser forming is the thermal process to deform a metal plate using the thermal stress produced by the rapid heating with the laser. In this study, the influence of irradiating conditions of CO
2 laser on the bending angle of the workpiece is investigated. The temperature at the back surface of the workpiece irradiated with CO
2 laser is measured using a two-color pyrometer with an optical fiber. The temperature distribution in the workpiece is calculated using the FEM thermal analysis. Simple bending experiments with one-way laser scanning are carried out. Stainless steel SUS304 of various thickness is used as work material. The results obtained are as follows. The bending angle is proportional to the temperature of the workpiece irradiated. The temperature of workpiece increases with the increase of laser power, the decrease of feed rate of the laser beam and the decrease of plate thickness. After all, the bending angle becomes larger with the increase of laser power, the decrease of the feed rate and the decrease of the thickness of the plate. The temperature of the workpiece can be used as a signal to control the deformation of the workpiece.
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Akinori SAITO, Motonari MIYAKAWA, Masaomi TSUTSUMI
2001 Volume 67 Issue 2 Pages
306-310
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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5-axis controlled machining centers with three linear axes and two rotary axes have been developed to produce mechanical parts and molds with complicated shape. Those machining centers are generally constructed at least by two links with rotational mechanism. The evaluation method of the deviations in the orthogonal three planes has been developed and already specified into the ISO standard. However, the evaluation method for five-axis controlled machining centers including A and C axes has not been investigated. In this study, the motion accuracy of the machining centers simultaneously controlled four axes is discussed. A ball-bar method is applied to the measurement of motion accuracy, and the simulation for evaluation of the error motion is conducted. The positional and geometric deviations existing in 5-axis controlled machining affect the simultaneous 4-axis control motion, and those deviations are estimated by the proposed method.
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Morihiko SAEKI, Heiji YASUI, Sumihisa KONDO, Masaki KAWADA, Akira HOSO ...
2001 Volume 67 Issue 2 Pages
311-315
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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The plastic optical components have recently been increasingly used as one of the key parts of the high precision equipments and machines such as over head projector, compact disk player, projection TV, copy machine. The present research aims to clarify the influence of cutting conditions on the surface roughness formed by ultra-precision cutting of plastics and as the result find the best plastic for ultra-precision cutting. For the purpose, the plastics of polymethyl methacrylate (PMMA), polycarbonate (PC) and cycliic olefin polymer (ZEONEX), which are the representative plastics used as the optical parts, are face-turned at various cutting conditions with single crystal diamond bite attached on the ultra-precision turning machine. Then the face-turned plastic surfaces are observed with a Nomarski differential interference microscope and measured with AFM (NanoScope III). The best surface roughness formed by dry ultra-precision cutting is about 20nm(Ry) for the PMMA plastic while it is over 100nm for the PC and ZEONEX. The cutting fluid supply is useful for improving the surface roughness and the best surface roughness formed by wet ultra-precision cutting of the PMMA plastic is about 10nm (Ry). The best surface roughness obtained in the wet cutting of the PMMA plastic is almost the same for the different bite nose radius. The depth of cut and cutting speed in the wet cutting of the PMMA plastic have little influence on surface roughness.
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An Effect of Substrate Orientation upon Si-Si Homo-Epitaxial Growth Mechanism
Arata KANEKO, Yuji FURUKAWA
2001 Volume 67 Issue 2 Pages
316-321
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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Silicon (Si) substrates of five different kinds of crystal orientations are epitaxially grown to 10-120nm in thickness by a Si molecular beam epitaxy under a same growth temperature of 800°C. These epitaxially grown surfaces were observed at each grown thickness by the help of AFM interprocessly, thus their surface formation processes were clarified as follows. In the cases of (100) and (110) substrates, first, many micro nuclei, 20-50nm in height, were generated, secondly, they were gradually combined together, and finally, the ridge of them became smoother. In the cases of (113) and (331) substrates, the formation and combination processes of nuclei were also observed, however, further deposited molecules could not fill the spaces among the nuclei completely. In the case of (111) substrate, most of adsorbed molecules were caught at arbitrary atomic steps and contributed to extend the length of their terraces. The further growth made some steps piled, so that, higher steps and wider terraces were gradually generated, 1-5nm in height and 200-400nm in width. These surface formation processes can be explained, to some extent, from the surface energy level, namely, the higher energy tends to result in the higher nucleation density.
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Hitoshi TOKURA, Kohmei MOROBAYASHI, Kyousuke Ai, Yoshihisa NORO, Yasuf ...
2001 Volume 67 Issue 2 Pages
322-326
Published: February 05, 2001
Released on J-STAGE: April 10, 2009
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This paper proposes agar as metal injection molding (MIM) binder in stead of usual plastic binders, expecting simple MIM process without debinding. Agar is natural material extracted from seaweeds and it can keep water in its structure. And agar is soluble in water at near 100°C and gelation of aqueous solution takes place at around 40°C. More the transformation is reversible. Firstly thermal stability, solubility into water and viscosity were examined and it was found agar up to 30% can be solved into water. Secondly titanium green compacts with agar binder were formed by uniaxial pressing and then they were sintered without debinding process. Obtained sintered compacts did not have any cracks on the surface at all. Finally 20 pieces of titanium samples with agar binder were injected. The density distribution of samples was within 5%. Then these were sintered at 1200°C for 1 hour in vacuum and, from the measurements of density and hardness, it is concluded that agar binder is available for MIM process.
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