Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Positioning Mechanism of FPD Inspection system
Hajime TAKAHASHI
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Keywords: flat panel display, inspection system, parallel mechanism
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2001 Volume 67 Issue 2 Pages 211-215

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