Cutting of Functional Material by Plasma CVM

Development of the Cutting Machine with Inner Blade Electrode and Its Cutting Characteristics

Abstract

For cutting the functional material, a mechanical machining method which applied cutting and grinding is generally used. Therefore, a deformed layer is left in the cut surface, and an another process for removing the deformed layer is required in order to restore the original performance of the functional materials. Plasma CVM (Chemical Vaporization Machining) which cannot leave deformed layer theoretically was applied to the cutting, and the equipment with high speed rotary inner blade electrode was developed, and machining characteristics using this equipment are described. Improving the cutting speed is carried out by sufficient supply of the reactant gas to the machining gap between the electrode and the work and by sufficient decomposition of supplied reactant gas. And, decreasing the kerf loss is carried out by the localization of the plasma generation.