Journal of the Japan Society for Precision Engineering
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
Thin Film Metallic Glass Actuators
Seiichi HATA, Akira SHIMOKOHBE
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Keywords: MEMS, micro actuators, 3D micro structures, amorphous, thin film metallic glasses
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2002 Volume 68 Issue 5 Pages 657-661

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