抄録
(Bi,La)4Ti3O12 thin films of Bi-layered perovskite structure were fabricated on Pt/TiOx/SiO2/Si substrates by chemical solution deposition (CSD) method. The crystallization and microstructure of the (Bi,La)4Ti3O12 thin films markedly depended upon the kind of used La-sources when the precursor solutions were prepared. Synthesized Bi3.35La0.75Ti3O12 (BLT) thin films from the precursor solution using a La(OiPr)3 as a starting material revealed (00l ) preferred orientation and anisotropic grain growth. On the other hand, BLT thin films using a La(OAc)3 as a La-source showed random orientation with a strong (117) reflection and homogeneous microstructure. This is due to the difference in the pyrolysis and crystallization behaviors of the precursor films. The BLT thin films exhibited the well-saturated ferroelectric P-E hysteresis loops. The BLT thin film prepared from a La-acetate showed the Pr value of 15.6 μC/cm2, which was higher than that of the BLT thin films from a La-alkoxide.
