Abstract
Aluminum nitride with oxide additive of CaO-Al2O3-Yb2O3 system was synthesized by 28GHz millimeter-wave heating method. Densification over 95%TD (TD: theoretical density) and thermal conductivity close to 150W/(m·K) were attained at a low temperature of 1500°C for 120min. The lowering of densification temperature was attributed to the predominantly heating of Yb2O3 in additive oxide, which arises from the effective absorption of millimeter-wave into Yb2O3. The successful synthesis of AlN with fairly high thermal conductivity at 1500°C is suggested to be available for an economical manufacturing of AlN.
