抄録
WC-Co alloys with WC grain sizes from 0.4 to 4.5 μm and the Co contents of 10 and 15 mass% were machined by focused ion beam (FIB) of 30 keV Ga+ and their surface roughness was investigated, where beam diameters are 100 nm and 300 nm, the beam overlap is 50 %, the pixel dwell times are 100 and 227μs and beam incident angles are from 0° to 50° degrees. Experimental results from the viewpoint of effect of microstructure showed that the surface roughness depended on width of Co phase. Moreover, it was revealed on the effect of machining conditions that small surface irregularities was obtained under the condition of larger beam diameter, shorter dwell time and higher beam incident angle in this work.
