粉体および粉末冶金
Online ISSN : 1880-9014
Print ISSN : 0532-8799
ISSN-L : 0532-8799
研究
パルス通電加熱したTi-Ni粉末焼結ターゲットならびにNaCl粉末焼結基板を用いたスパッタ成膜
小林 慶三尾崎 公洋三上 祐史石川 幸雄
著者情報
ジャーナル オープンアクセス

2007 年 54 巻 2 号 p. 107-111

詳細
抄録
Sodium chloride powder has been consolidated using pulsed-current sintering method for the substrate. The utilization of the punch made of Ti-2at%Fe-10at%Si alloy has made it possible to produce a sodium chloride compact with a smooth surface and no reactant. Ti-Ni thin film has been prepared on the sodium chloride substrate by sputtering method. Ti-Ni sputtering target has been prepared using pulsed current sintering of the powder mixture of Ti and Ni powders with the composition of Ti-50at%Ni.
The thickness of Ti-Ni film prepared for the sputtering time of 10.8 ks has been about 70μm. The sputtered Ti-Ni film has been spontaneously separated from the sodium chloride substrate in the water. The film has had an amorphous structure and crystallized at 820 K.
著者関連情報
© 2007 一般社団法人粉体粉末冶金協会

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