Millimeter Wave Sintering of AlN Ceramics with High Thermal Conductivity

Abstract

By using 24 GHz millimeter-wave irradiation, a full densification of AlN with the addition of Y₂O₃ was attained at 1700°C, which is comparable to 28GHz-wave irradiation. Thermal conductivity of thus obtained sample exceeded 200 W/(m·K), which is the highest value among AlN-based ceramics fabricated in non-reducing atmosphere. The full densification was also reached at 1700°C in the Yb₂O₃ added AlN, which temperature was higher than that for 28GHz-wave irradiated ceramics by ca. 100°C.