簡易SPS装置の作製

抄録

A simple SPS apparatus was made at low cost. Die current of order of 1,000 A is required for ordinary SPS machines, even for a compact type machine. SPS apparatus made in this study requires a current below 100 A, because the machine uses SiC die. SiC die has too low electric conductivity for the ordinary SPS machines. By preheating the SiC die, sufficient electric current flows by an applied voltage below 100 V. Because the electric conductivity of SiC die at elevated temperature is lower than that of graphite, the same power as the graphite die can be obtained with a current below 100 A. Control of electric current below 100 A is easy. Electric modules having such capacities for the control of electric furnace are commercially available. The apparatus was made combining such modules.