2018 年 65 巻 11 号 p. 683-686
New LTCC (Low Temperature Co-fired Ceramics) material that consists of Mg2SiO4, SrTiO3 and highly crystallized Li-Mg-B-Si-O glass was developed. The dielectric constant was 8.8 and Q value was 1620 at 25 GHz (Qf = 40500 GHz). And also, its temperature coefficient of dielectric constant τεr was +16 ppm/°C, which was much smaller than that of the existing LTCC material having high Q value. It is a promising LTCC material applying to the high frequency electric component.