ナノ冶金プロセスによるメタ表面の改質

抄録

Meta-optics, which is the optics for nanosized objects including the metallic and dielectric nanoparticles, have been established rapidly in recent years. One topic in meta-optics is metasurface comprising the assembly of nano particles on the surface to harness the light. We found that the metallurgy process is applicable to enhance the optical performance of metasurfaces. In this review, we describe how the rapid thermal annealing, or “nano-metallurgy process”, improves the metasurfaces via decreasing the optical loss of the nanoparticles, and introduce our experimental works demonstrating that the nano-metallurgy process indeed enhances the optical performance of the metasurfaces. We also show the examples where the thermal oxidation can make the high-quality dielectric metasurfaces. We believe that the research community of meta-optics can learn and benefit from metallurgy to establish new and interesting metasurfaces.