PVD硬質皮膜の基本技術と最近の技術動向

抄録

Hard coatings are used for wear resistance applications, particularly to improve the performance of cutting tools. These cutting tools are mainly coated with TiAlN, TiSiN, and AlCrN. Especially, high aluminum coating and nano-composite coatings exhibit excellent performance. These coatings can significantly improve machining efficiency due to excellent coating properties. Currently, coating technology has evolved significantly in terms of coating composition and deposition equipment. As a result, coating composition and structure have become more complex, and performance has become more advanced. These technologies are based on fundamental PVD technology and hard coatings. This article reviews fundamental PVD technology and hard coatings and provides an overview of the latest technological trends.