抄録
If a double layer thin film composed of different atomic spieces is annealed, an intermetallic phase may easily be formed. The formation process of the phase can be successively investigated using such a thin film diffusion couple; this approach is proposed to be called "thin film metallurgy". Helium ion back scattering experiment, which provides an important tool in the thin film metallurgy, is briefly introduced. As an instructive example, a formation process of MnBi thin film is described.
