Abstract
The diamond layer was deposited on the cemented carbides cutting inserts by microwave plasma assisted CVD process. The microwave plasma assisted CVD equipment had precise substrate position control system and substrate cooling system. So uniform plasma was generated on the three dimensional substrate such as cutting inserts and the surface temperature of the substrate was controlled independently from the microwave input power.
The diamond coated insert at relatively high pressure and microwave input power showed good cutting performance for high speed Al-Si alloy cutting.
