Abstract
Thin films of spinel-type iron oxides (Fe3O4-γ-Fe2O3 compounds), α-Fe2O3, and β-Fe2O3 were prepared by plasma assisted chemical vapor deposition from mixed gas containing Fe(C5H7O2)3 and O2 at 250-350°C. The spinel-type oxide films were obtained under conditions of low O2/Fe(C5H7O2)3 mol ratio. But, α-Fe2O3 or β-Fe2O3 films were prepared under high O2/Fe(C5H7O2)3 mol ratio. α-Fe2O3 and β-Fe2O3 were inclined to be formed as single phase at the temperature above and below 300°C, respectively. The spinel-type oxide films tended to be formed as (100) preferred orientated film irrespective of kinds of substrate.
