Abstract
Superconductive films composed of Ba2YCu3O7-X were prepared by fume pyrolysis with a temperature programmed electric furnace. Fumes generated from an aqueous solution of Ba, Y and Cu nitrates with an aid of supersonicant were introduced into the furnace with flowing O2. Fine particles consisting of Ba, Y and Cu ions were formed in the furnace and deposited on the surface of a YSZ substrate placed at the top of the furnace. Films thus prepared and annealed at 1273 K showed superconductive properties below 90 K and zero resistivity was observed at 80 K with 100 uA of the current.