抄録
Superstructured alloy films composed of non-nitride layers and nitride layers such as Co-Nb-Z r/Co-Nb-Zr-N and Fe-Nb-B/Fe-Nb-B-N are prepared by N2 reactive R F sputtering. S oft magnetic properties are obtained when the layer thickness is less than 15 nm for the films comprizing metal-metalloid elements and less than 30 nm for the films comprizing metal-metal elements. Layered structures of the obtained films remained even after annnealing up to 600 °C in the metal-metalloid alloy films, while they changed into weakly compositionally modulated structures in the metal-metal alloy films. These films show high permeabilities (>2000 at1 MHz) and high saturation magnetizations (4π Ms=13-15 kG) and are promizing magnetic core materials for VTR or computer heads.
