Structure and Magnetic Properties of Fe₄N/Fe Multilayered Films

Abstract

Magnetic properties of iron nitride thin films as well as Fe₄N/Fe multilayered films prepared by a reactive plasma deposition method have been investigated. The Fe₄N single phase was produced under P_N2=4mTorr, substrate temperature=above 300°C and output power of r.f. generator=above 300W.
The multilayered films consisting of Fe/Fe₄N/Fe as well as Fe₄N/Fe/Fe₄N were deposited by control-ling the plasma power. The saturation magnetization of the multilayered films mainly depended on the thickness of the Fe layers. The coercive force of the films was greater than that of the Fe single phase because of nitrogen from the Fe₄N layer was diffused into the Fe layer. The film, of a small coercive force of 29 Oe, containing little nitrogen in the Fe layer was made when the deposition rate of the iron in the Fe₄N/Fe/Fe₄N multilayered film became speeded up.