Abstract
Chemical vapor deposition equipment was applied to produce ultra-fine powders of AlN where Al was melted by radio-frequency generator in NH3 atmosphere.The chemical reaction was carried out at 1450K for 3.6ks.and the obtained samples were analyzed by TEM.SEM and XRD.The degree of AlN synthesis became higher.and the uniformity of ultra-fine AlN perticle size became higher with increasing amount of NH3 gas supply.And the tendency that the amount of AlN particles with sub-micronorder might be higher with increasing flow rate of NH3 gas.was also confirmed.
