Preparation of Ultra-fine Alminium Nitride by Gas Phase Reaction

Abstract

Chemical vapor deposition equipment was applied to produce ultra-fine powders of AlN where Al was melted by radio-frequency generator in NH₃ atmosphere.The chemical reaction was carried out at 1450K for 3.6ks.and the obtained samples were analyzed by TEM.SEM and XRD.The degree of AlN synthesis became higher.and the uniformity of ultra-fine AlN perticle size became higher with increasing amount of NH3 gas supply.And the tendency that the amount of AlN particles with sub-micronorder might be higher with increasing flow rate of NH₃ gas.was also confirmed.