Cross-sectional TEM Study of Oxide Superconducting Thin Films

Abstract

We have examined the microstructures of Cu-oxide superconducting thin films by cross-sectional transmission electron microscopic(TEM) observation. The films were prepared by reactive evaporation method with RHEED oscillations monitoring. The cross-sectional TEM observation provided informations on the growth mechanism of 1:2:3 compounds and on the epitaxial relations between the films and substrates. Sharp interfaces between the thin film of 123 compound and substrate were confirmed.