Abstract
The Bi-Pb-Sr-Ca-Cu-O films were prepared on MgO crystal by rf magnetron sputtering using multi targets; Bi0.5Pb0.5Ox, CaCu0.75Ox and SrCu0.75Ox. The films were two-step-annealed to be crystallized. The primary annealing was done for 780°C×2 hours and the secondary annealing for 842°C×130 hours. Obtained films were patterned on a meander shape by photolithography method to increase the sensitivity in the magnetic field. The linewidth was 100μm and the space between lines was 50μm. The sensitivity in magnetic field for this small size film was 66.18mV/gauss. The result indicated that it is possibile to miniaturize the magnetic detector by the patterning of the superconducting film.
