Abstract
The formations of molybdenum silicides from various reaction systems were investigated in Ar or Ar+H2 atmosphere at 1200-1400°C in order to produce fine MoSi2 powder. The direct reaction of Mo and Si powders produced MoSi2 by heating at 1300-1400°C. However, the product was hard agglomerates. The reduction of molybdenum oxide with SiC formed mainly Mo5Si3C and Mo5Si3, and the
amount of MoSi2 was small. The carbothermal reduction of molybdenum oxide and silica gave MoSi2 powder at 1400°C. The reaction was stimulated in Ar+H2 atmosphere compared with Ar atmosphere. The agglomeration of particles was weak, and the primary size was 0.5-2 μm.