シリサイド系金属間化合物のメカニカルアロイングによる合成

抄録

Ti₅Si₃ powder was synthesized by mechanical alloying (MA) of Ti powder and Si powder using a vibrational ball milling under 35kPa Ar. When stainless steel was used as a vessel and balls for MA, the obtained MA powder was amorphous and included a considerable amount of Fe because of adhesive wear of MA balls.
ZrO₂ ball forms coating layer on the surface of a ball in MA process, so that the contamination from MA ball to MA powder can be reduced. The Ti₅Si₃ powder milled for 720ksec with ZrO₂ balls was not amorphous and contained Ti and Si crystal phase. WSi₂ powder and MoSi₂ powder were not synthesized by MA of W powder and Si powder or Mo powder and Si powder for 720ksec with ZrO₂ balls.