抄録
The structure and magnetic properties of Sm-Co films and Sm-Co/M (M=Co, Fe) multilayered films prepared by rf sputtering were investigated. The results show that a hard magnetic phase as Sm2Co17 and SmCo5 phase and a soft magnetic phase were formed by annealing Sm-Co and Sm-Co/M films. Sm16Co84 film annealed for 1.8 ks at 773 K had the springback ratio of [Mr-M(H)]/[Mr-M(H)]=0.72. This film was found to behave as a exchange-spring magnet composed of a hard magnetic phase and a soft magnetic phase. Sm16Co84/Fe multilayered film was also found to be a exchange-spring magnet.