抄録
Fine SiC powder and SiC-TiC composite powder were prepared by vapor phase reactions using Si(CH3)4 and TiCl4. The particle size was about 200nm. They were hot-pressed at 2000°C in Ar with a sintering aid of Al2O3 or Y2O3-Al2O3 system. The sintered bodies were densified to 98-99% of theoretical. Rod-like grains were observed in monolithic SiC with both Al2O3 and Y2O3-Al2O3 system, and the higher fracture toughness was observed in Y2O3-Al2O3 system. The fracture toughness was increased by TiC inclusions although the growth of rod-like SiC grains tended to be retarded. The growth of SiC grains was exaggerated in SiC-TiC composite powder with a large amount of Y2O3-Al2O3 sintering aid, leading to more improved fracture toughness. The present results suggest that the improvement of fracture toughness can be enhanced by combination of rod-like SiC grain growth and TiC inclusion with Y2O3-Al2O3 sintering aid.
