微細加工を施したペロフスカイト型マンガン酸化物薄膜の作製と物性

抄録

Wires and dots of the perovskite-type manganese oxides with the dimension of micrometer were experimentally fabricated by the electron-beam lithography method and Ar-ion dry etching of those oxide thin films. The La_0.7Sr_0.3MnO₃ thin films were prepared by the pulsed laser deposition (PLD) method with a KrF excimer laser. The wire of 1μm width showed a larger magnetoresistance than that of the thin film. Definite magnetic force microscope (MFM) images revealing movement of the domain structure were observed for the 2×2 μm square dots under an applied in-plane magnetic field.