抄録
The relationship between thermal conductivity and intergranular oxide phase variation in AlN sintered by millimeter-wave heating was investigated. The thermal conductivity was increased with the decrease of a ratio of Al2O3 to Yb203+Al2O3 in the intergranular phase. When a high thermal conductivity of 210 W/(m⋅K) was obtained at 1973 K for 3 hrs under a mixed gas atmosphere of N2 with 3 vol% H2, Yb2O3 phase was observed as an intergranular phase, unlike conventional sintering.
