Journal of Jpan Laser Processing Society
Online ISSN : 2435-9181
Print ISSN : 1881-6797
Topics of New Technologies
Fabrication of Rutile-Type TiO2 Thin Films at Low Temperature and Low Cost
Akihiro ISHII, Itaru OIKAWA, Hitoshi TAKAMURA
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Keywords: Pulsed laser deposition, KrF excimer laser, , TiO2 thin film, Al doping, High refractive index, Optical coating, Dielectric mirror
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2018 Volume 25 Issue 2 Pages 55-57

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