抄録
Axial distributions of radiation intensity from coupled parallel plate RF glow discharges with RF power fixed at 30W and RF frequency at 13.56MHz, were measured as a function of gas pressure for neon and argon. The spectral intensities for neon and argon in RF glow discharges were also measured at a fixed RF frequency of 13.56MHz as a function of RF power. Furthermore, the axial distributions of spectral intensity were investigated as functions of gas pressure, RF power, and RF frequency. The gas pressure was varied over the range from 0.1 to 10.0 Torr, the RF power from 10 to 50W, and the RF frequency from 2MHz to 13.56MHz. It was observed that the radiation intensity has a maximum value at a certain distance from the driven electrode and shifts towards the electrode with increasing gas pressure. The spectral intensities increase in proportional to RF powers. The dependence of spectral intensity on gas pressure was similar to those of radiation intensity. It was found that the ion sheath formed in front of the driven electrode increased as the RF frequency decreased and that the spectral intensity decreased with decreasing RF frequency. The optical and spectral characteristics of the RF discharges were qualitatively discussed.
