抄録
Micro computed tomography (μCT) is quite useful in the nondestructive evaluation of devices with complicated internal structures. However, a large difference in x-ray absorption coefficients of the materials produces streak and star pattern artifacts in a CT image. These artifacts, which are called “metal artifacts”, make it difficult to inspect an image of the device. Hence, this study strives to develop a new reconstruction method that reduces the artifacts from images. In this paper, we first discuss the cause of the artifacts using CT data of a sample. Next, we propose a CT reconstruction algorithm to reduce the artifacts. The basic idea of the algorithm is that it corrects the projection data. The shapes of high density parts such as metals are extracted by a threshold method and projection data are replaced to consistent values. Finally, we apply the method to select devices, and confirm that the method is applicable to nondestructive inspections.
