抄録
The effect of ion bombardment during film growth was investigated on perpendicular anisotropy CoCr films. Films were prepared by a web-coater type evaporating system equipped with a Kaufman 3 cm ion source. Ms, Hc⊥ and Δθ50 decreased while Hk⊥ and grain size increased in bombarded films. These results indicate the reduction of crystallographic defects and Cr segregation, suggesting that the grain boundary plays an important role in the segregation.
