Journal of the Magnetics Society of Japan
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
Magnetic Thin Films
Ion-Assisted Effect on Ion-Beam-Sputtered CoCr Films
A. TagoC. Nishimura
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JOURNAL OPEN ACCESS

1989 Volume 13 Issue 2 Pages 331-334

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Abstract
CoCr films are prepared by dual ion beam sputtering on Ti coated glass substrates. Magnetic and crystallographic properties are investigated as a function of the ion-assisting conditions.
Ion-assisted deposition with a low acceleration voltage of less than 200 V is very effective in increasing perpendicular coercivity and also decreasing inplane squareness, which implies the initial film layer is thin. It also promotes growth of a well-oriented columnar structure.
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© 1989 by The Magnetics Society of Japan
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