抄録
CoCr films are prepared by dual ion beam sputtering on Ti coated glass substrates. Magnetic and crystallographic properties are investigated as a function of the ion-assisting conditions.
Ion-assisted deposition with a low acceleration voltage of less than 200 V is very effective in increasing perpendicular coercivity and also decreasing inplane squareness, which implies the initial film layer is thin. It also promotes growth of a well-oriented columnar structure.
