Fe-2∼4 at%Si多層膜の軟磁気特性

抄録

Fe-3.4 at%Si/Si₃N₄ multilayered films were prepared by RF sputtering. Soft magnetic properties were obtained when intermediate layers (SiN_x) were deposited in Ar+N₂ atmosphere and had the composition ratio (N/Si) of about 4/3. Interestingly, these films retain low coercivity of about 2 Oe after annealing (60O°C-2 hr) while Fe-3.4 at %Si/SiO₂ multilayered films show high coercivity of more than 5 Oe after the same annealing. It was confirmed that Si₃N₄ layers prevent the grain growth of magnetic layers more effectively than SiO₂ layers at high temperatures. It was also confirmed that multilayered structures of Fe-3.4 at%Si/Si₃N₄ are more thermally stable than those of Fe-3.4 at%Si/SiO₂.