Fabrication of an Composite Inductance Using Co-Metal Amorphous Multilayered Films

Abstract

Co₈₄Zr_5.5Nb_10.5 and Co₇₉Zr₁₀Mo₉Ni₂ amorphous films were multilayered by sputtering with SiO₂ as intermediate films. An inductor for high frequency application was fabricated with those films and Ni-Zn ferrite yoke. In order to improve the high frequency characteristics, stripe patterned films were studied. The films were annealed in a magnetic field and the frequency dependence of the multilayered films was measured in the frequency range 0.01∼200 MHz. The striped films showed better frequency characteristics than the unstriped films. An inductor made of striped films with a total thickness of 20μm and ferrite yokes exhibited an inductance of over 10μH at 1 MHz with frequency characteristics improved over those of Ni-Zn ferrite alone.