STUDY OF SPUTTERED CARBON SURFACE PROTECTIVE LAYER

抄録

  The tribological properties of sputtered carbon overcoats are important for the practical use of hard magnetic disks. The effects of sputtering conditions on the structure and properties of carbon overcoats have been studied in this paper. Carbon films deposited under high bias, low argon pressure and substrate temperature are hard, with the i-carbon structure and large friction coefficient. Carbon films formed under the opposite conditions are soft, with the graphite structure and small friction coefficient.