FeN/FeBN多層膜の軟磁気特性

抄録

Magnetic and structural properties of multilayered FeN /FeBN films prepared with dual-type sputtering were investigated. Laminating the FeBN films with FeN films increases the electrical resistivity (R) up to 200 μΩcm. decreases slightly the saturation magnetization and shows excellent soft magnetic properties (coercivity ≤ 0.2 Oe and permeability ≥ 1000) in wide combination range of film thickness for both films, although FeBN single film has high R about 400 μΩcm, B_s about 12 kG and semi-hard magnetic properties with perpendicular magnetic anisotropy. SEM observation suggests that soft magnetic properties of FeN/FeBN multi-layers originate in their in-plane anisotropy and fine grains in the films. Despite film thickness over 2 μm, permeability of about 1000 was maintained even near 100 MHz. Enhanced frequency response of permeability is strongly attributed to the increased electrical resistiviy of the films, multi-layered with FeBN.