多層膜・人工格子
Co/Pt多層膜の磁気特性に及ぼす熱処理効果
1992 年 16 巻 2 号 p. 325-328
詳細
1992 年 16 巻 2 号 p. 325-328
Co/Pt multilayers sputter-deposited with and without substrate bias VB of -30 V were annealed in vacuum at 300 and 400°C. With annealing. the saturation magnetization Ms and the saturation Kerr rotaion angle θK increased. On the other hand, the perpendicular anisotropy energy Ku decreased manotonically. The decrease of Ku was larger for -30 V films than for 0 V films because of the larger decrease of surface anisotropy Ks for -30 V films. This larger decrease of Ks was discussed by taking account of relaxation in the lattice strain due to annealing.
