ポリイミド上に作製したCo系アモルファス薄膜の軟磁性

抄録

CO-Nb-Ta-Zr amorphous films were fabricated on polyimide sheets. Thermal changes of the coercive forces and the uniaxial anisotropy field were investigated in order to obtain annealing conditions for improvement of the magnetic softness. The amorphous films on the polyimide sheets were found to exhibit good magnetic softness comparable to those on glass substrate. Based on those results the sheets were wound around a quartz bobbin and after annealing in a D.C. or rotating magnetic field, frequency dependence of the initial permeability was measured. Initial permeability as high as 2500 with little decay up to 30 MHz was obtained.