磁気記録媒体
Texturing of Glass Disks by Microgrid Method
1992 年 16 巻 2 号 p. 79-82
詳細
1992 年 16 巻 2 号 p. 79-82
A new texturing method for glass disk substrates is proposed. Thin perforated plastic film (microgrid) is first formed on a substrate, and then the substrate is chemically etched using the perforated film as a mask. The textured substrate has micro round holes distributed uniformly on the surface. A 0.2 μm thick magnetic film and 0.025 μm thick carbon overcoat were sputter-deposited on the textured substrate and CSS tests were carried out using a Al2O3-TiC minislider head. The microgrid-textured disk of 3 μm hole diameter and of 0.1 μm hole depth showed a good friction coefficient as low as 0.4 after 25600 CSS cycles. This result is better than that of a mechanically textured disk of similar surface roughness.
