The effects of magnetic field annealing on the magnetic anisotropy of Fe-Zr-N fine-grained films multilayered with AlN films as spacers were investigated. The thermal stability of the magnetic anisotropy was dependent on the multilayered structure. After pre-annealing at 673 K for 1 hour, reversible relaxations of ΔKu = 100～700 J/m3 were found in the field induced anisotropy, depending on thickness of the magnetic layers. It was found that non-magnetic layer AlN effected on the field induced anisotropy of the magnetic layers and contributed its thermal stability of the soft magnetic properties.
