抄録
This paper reports the design of a magnetic multilayer film with high permeability and low loss in the 1 MHz-1 GHz frequency range. The thickness of each layer and the magnetic anisotropy were optimized with respect to eddy-current loss and ferromagnetic resonance in the magnetic layers and dielectric break-down in the nonmagnetic insulator layers. A limit law that stands up between the permeability μ′r(0) and the cut-off frequency fc was analyzed, and the limit μ′r(0)×fc was expected to have a much higher value than Snoek's limit. The constant μ′r of 300 in the range of 1 MHz-1GHz was achieved in an optimized CoZrNb/SiO2 multilayer film.
