薄膜インダクタの大振幅励磁特性の計測

抄録

This paper discusses the basic properties of thinfilm inductors driven at high flux densities. We made inner-coil-type thin-film inductors, each with either a closed magnetic circuit or an open magnetic circuit, and developed a technique for measuring the impedance of the inductors at high flux densities. To do this, we used this technique to reduce the voltage multiple reflection between the amplifier and the inductor. The impedance of the magnetic thin-film inductors varied according to the magnetic field intensity, because of flux saturation.